High-quality-factor tantalum oxide nanomechanical resonators by laser oxidation of TaSe2

SJ Cartamil Bueno, PG Steeneken, FD Tichelaar, Efrén Navarro-Moratalla, WJ Venstra, R Leeuwen, E Coronado, HSJ van der Zant, GA Steele, A Castellanos-Gomez

Research output: Contribution to journalArticleScientificpeer-review

19 Citations (Scopus)
Original languageEnglish
Pages (from-to)2842-2849
Number of pages8
JournalNano Research
Volume8
Issue number9
DOIs
Publication statusPublished - 2015

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