High-quality-factor tantalum oxide nanomechanical resonators by laser oxidation of TaSe2

SJ Cartamil Bueno; PG Steeneken; FD Tichelaar; Efrén Navarro-Moratalla; WJ Venstra; R Leeuwen; E Coronado; HSJ van der Zant; GA Steele; A Castellanos-Gomez

doi:10.1007/s12274-015-0789-8

High-quality-factor tantalum oxide nanomechanical resonators by laser oxidation of TaSe2

SJ Cartamil Bueno, PG Steeneken, FD Tichelaar, Efrén Navarro-Moratalla, WJ Venstra, R Leeuwen, E Coronado, HSJ van der Zant, GA Steele, A Castellanos-Gomez

QN/Steeneken Lab

Research output: Contribution to journal › Article › Scientific › peer-review

26 Citations (Scopus)

Original language	English
Pages (from-to)	2842-2849
Number of pages	8
Journal	Nano Research
Volume	8
Issue number	9
DOIs	https://doi.org/10.1007/s12274-015-0789-8
Publication status	Published - 2015

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title = "High-quality-factor tantalum oxide nanomechanical resonators by laser oxidation of TaSe2",

author = "{Cartamil Bueno}, SJ and PG Steeneken and FD Tichelaar and Efr{\'e}n Navarro-Moratalla and WJ Venstra and R Leeuwen and E Coronado and {van der Zant}, HSJ and GA Steele and A Castellanos-Gomez",

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AU - Cartamil Bueno, SJ

AU - Steeneken, PG

AU - Tichelaar, FD

AU - Navarro-Moratalla, Efrén

AU - Venstra, WJ

AU - Leeuwen, R

AU - Coronado, E

AU - van der Zant, HSJ

AU - Steele, GA

AU - Castellanos-Gomez, A

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JO - Nano Research

JF - Nano Research

IS - 9

ER -

High-quality-factor tantalum oxide nanomechanical resonators by laser oxidation of TaSe2

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