High-resolution capacitive measurement of microstructure displacement using coherent detection

L Mol; G de Graaf; LA Rocha; RF Wolffenbuttel

High-resolution capacitive measurement of microstructure displacement using coherent detection

L Mol, G de Graaf, LA Rocha, RF Wolffenbuttel

Electronic Instrumentation

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Eurosensors XIX, proceedings
Editors	de R Reus, S Bouwstra
Place of Publication	Piscataway
Publisher	IEEE
Pages	1-4
Number of pages	4
ISBN (Print)	84-475-2984-3
Publication status	Published - 2005
Event	The 19th European conference on solid-state transducers (Eurosensors XIX), Barcelona, Spain - Piscataway Duration: 11 Sept 2005 → 14 Sept 2005

Publication series

Name
Publisher	IEEE

Conference

Conference	The 19th European conference on solid-state transducers (Eurosensors XIX), Barcelona, Spain
Period	11/09/05 → 14/09/05

Bibliographical note

Editor onbekend

Keywords

conference contrib. refereed
Conf.proc. > 3 pag

Cite this

@inproceedings{c314a47aaa3a4ae290b07e8629827afb,

title = "High-resolution capacitive measurement of microstructure displacement using coherent detection",

keywords = "conference contrib. refereed, Conf.proc. > 3 pag",

author = "L Mol and {de Graaf}, G and LA Rocha and RF Wolffenbuttel",

note = "Editor onbekend; The 19th European conference on solid-state transducers (Eurosensors XIX), Barcelona, Spain ; Conference date: 11-09-2005 Through 14-09-2005",

year = "2005",

language = "Undefined/Unknown",

isbn = "84-475-2984-3",

publisher = "IEEE",

pages = "1--4",

editor = "{R Reus}, de and {S Bouwstra}",

booktitle = "Eurosensors XIX, proceedings",

address = "United States",

}

TY - GEN

T1 - High-resolution capacitive measurement of microstructure displacement using coherent detection

AU - Mol, L

AU - de Graaf, G

AU - Rocha, LA

AU - Wolffenbuttel, RF

N1 - Editor onbekend

PY - 2005

Y1 - 2005

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 84-475-2984-3

SP - 1

EP - 4

BT - Eurosensors XIX, proceedings

A2 - R Reus, de

A2 - S Bouwstra, null

PB - IEEE

CY - Piscataway

T2 - The 19th European conference on solid-state transducers (Eurosensors XIX), Barcelona, Spain

Y2 - 11 September 2005 through 14 September 2005

ER -