High-Resolution electron-beam-induced deposition

P. A. Crozier, CW Hagen

    Research output: Chapter in Book/Conference proceedings/Edited volumeChapterScientific

    Original languageUndefined/Unknown
    Title of host publicationNanofabrication: fundamentals and applications
    Editors A.A. Tseng
    Place of PublicationArizona State University
    PublisherWorld Scientific Publishing
    Pages399-431
    Number of pages574
    ISBN (Print)978-9812700766
    Publication statusPublished - 2008

    Keywords

    • authored books
    • Boekdeel internat.wet

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