High-resolution MEMS inertial sensor combining large-displacement buckling behaviour with integrated capacitive readout

Brahim El Mansouri*, Luke M. Middelburg, René H. Poelma, Guo Qi Zhang, Henk W. van Zeijl, Jia Wei, Hui Jiang, Johan G. Vogel, Willem D. van Driel

*Corresponding author for this work

Research output: Contribution to journalArticleScientificpeer-review

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