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High-resolution MEMS inertial sensor combining large-displacement buckling behaviour with integrated capacitive readout
Brahim El Mansouri*, Luke M. Middelburg, René H. Poelma, Guo Qi Zhang, Henk W. van Zeijl, Jia Wei, Hui Jiang, Johan G. Vogel, Willem D. van Driel
*Corresponding author for this work
Research output: Contribution to journal › Article › Scientific › peer-review
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