High Resolution Passive THz Imaging Array with Polarization Reusage in 22nm CMOS

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Abstract

A 12-pixel THz Focal Plane Array (FPA), integrated in Global Foundries 22nm CMOS technology, enabling high resolution passive THz imaging, is presented. The array efficiently couples blackbody radiation from 200 GHz to 600 GHz to Schottky Barrier Diodes (SBDs) in a differential topology. An antenna-detector co-design results in an average Noise Equivalent Power (NEP) of 0.9 pW/ sqrt{ text{Hz}}. An extremely small array periodicity is achieved by using two orthogonal polarizations. Such configuration enables passive imaging with a near-diffraction limited resolution while simultaneously maintaining a high optical efficiency of 42%. The array is currently in tape-out and measurements will be presented at the conference.

Original languageEnglish
Title of host publication2019 44th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz)
PublisherIEEE
Pages1-2
Number of pages2
ISBN (Electronic)978-1-5386-8285-2
ISBN (Print)978-1-5386-8286-9
DOIs
Publication statusPublished - 2019
Event44th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2019 - Paris, France
Duration: 1 Sep 20196 Sep 2019

Conference

Conference44th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2019
CountryFrance
CityParis
Period1/09/196/09/19

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