| Original language | English |
|---|---|
| IPC | B81C, H01L, G02B, B81B, B82Y |
| Priority date | 20/08/19 |
| Publication status | Published - 2021 |
Bibliographical note
Patent: OCT-19-066Applicant: TU Delft
Applicant: TU Delft
High-selectivity dry release of dielectric structures
R.A. Norte (Inventor), S. Groeblacher (Inventor)
Research output: Patent
Applicant: TU Delft