High-selectivity dry release of dielectric structures

R.A. Norte (Inventor), S. Groeblacher (Inventor)

Research output: Patent

Original language	English
IPC	B81C, H01L, G02B, B81B, B82Y
Priority date	20/08/19
Publication status	Published - 2021

Bibliographical note

Patent: OCT-19-066
Applicant: TU Delft

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