High sensitive gas sensors realized by a transfer-free process of CVD graphene

Filiberto Ricciardella; Sten Vollebregt; T Polichetti; B. Alfano; E. Massera; Lina Sarro

doi:10.1109/ICSENS.2016.7808638

High sensitive gas sensors realized by a transfer-free process of CVD graphene

Filiberto Ricciardella, Sten Vollebregt, T Polichetti, B. Alfano, E. Massera, Lina Sarro

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

14 Citations (Scopus)

71 Downloads (Pure)

Abstract

The work herein presented investigates the behavior of graphene-based gas sensors realized by using an innovative way to prepare graphene. The sensing layer was directly grown by chemical vapor deposition on pre-patterned CMOS compatible Mo catalyst and then it was eased on the underlying SiO2 through a completely transfer-free process. Devices with different geometries were designed and tested towards NO2 and NH3 in environmental conditions, i.e. room temperature and relative humidity set at 50%. Furthermore, these gas sensors were also calibrated, resulting in the ability to detect concentrations down to 240 ppb and 17 ppm of NO2 and NH3, respectively. These results are in agreement with the best performances reported in literature for graphene-based sensors. They not only confirm the successful devices fabrication through the transfer-free approach, but also pave the route for large-scale production of MEMS/NEMS sensors.

Original language	English
Title of host publication	2016 IEEE Sensors Proceedings
Editors	E. Fontana, C. Ruiz-Zamarreno
Place of Publication	Piscataway, NJ
Publisher	IEEE
Pages	697-699
Number of pages	3
ISBN (Electronic)	978-1-4799-8287-5
DOIs	https://doi.org/10.1109/ICSENS.2016.7808638
Publication status	Published - 2016
Event	IEEE Sensors 2016: 15th IEEE Sensors Conference - Caribe Royale All-Suite Hotel and Convention Center, Orlando, FL, United States Duration: 30 Oct 2016 → 2 Nov 2016 Conference number: 15

Conference

Conference	IEEE Sensors 2016
Country/Territory	United States
City	Orlando, FL
Period	30/10/16 → 2/11/16

Bibliographical note

Accepted author manuscript

Keywords

graphene-based gas sensors
environmental conditions
chemical vapor deposition
transfer-free process

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10.1109/ICSENS.2016.7808638

11145304 - 07808638Accepted author manuscript, 305 KB

Cite this

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title = "High sensitive gas sensors realized by a transfer-free process of CVD graphene",

abstract = "The work herein presented investigates the behavior of graphene-based gas sensors realized by using an innovative way to prepare graphene. The sensing layer was directly grown by chemical vapor deposition on pre-patterned CMOS compatible Mo catalyst and then it was eased on the underlying SiO2 through a completely transfer-free process. Devices with different geometries were designed and tested towards NO2 and NH3 in environmental conditions, i.e. room temperature and relative humidity set at 50%. Furthermore, these gas sensors were also calibrated, resulting in the ability to detect concentrations down to 240 ppb and 17 ppm of NO2 and NH3, respectively. These results are in agreement with the best performances reported in literature for graphene-based sensors. They not only confirm the successful devices fabrication through the transfer-free approach, but also pave the route for large-scale production of MEMS/NEMS sensors.",

keywords = "graphene-based gas sensors, environmental conditions, chemical vapor deposition, transfer-free process",

author = "Filiberto Ricciardella and Sten Vollebregt and T Polichetti and B. Alfano and E. Massera and Lina Sarro",

note = "Accepted author manuscript; IEEE Sensors 2016 : 15th IEEE Sensors Conference ; Conference date: 30-10-2016 Through 02-11-2016",

year = "2016",

doi = "10.1109/ICSENS.2016.7808638",

language = "English",

pages = "697--699",

editor = "E. Fontana and C. Ruiz-Zamarreno",

booktitle = "2016 IEEE Sensors Proceedings",

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Ricciardella, F, Vollebregt, S, Polichetti, T, Alfano, B, Massera, E & Sarro, L 2016, High sensitive gas sensors realized by a transfer-free process of CVD graphene. in E Fontana & C Ruiz-Zamarreno (eds), 2016 IEEE Sensors Proceedings. IEEE, Piscataway, NJ, pp. 697-699, IEEE Sensors 2016, Orlando, FL, United States, 30/10/16. https://doi.org/10.1109/ICSENS.2016.7808638

High sensitive gas sensors realized by a transfer-free process of CVD graphene. / Ricciardella, Filiberto; Vollebregt, Sten; Polichetti, T et al.
2016 IEEE Sensors Proceedings. ed. / E. Fontana; C. Ruiz-Zamarreno. Piscataway, NJ: IEEE, 2016. p. 697-699.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - High sensitive gas sensors realized by a transfer-free process of CVD graphene

AU - Ricciardella, Filiberto

AU - Vollebregt, Sten

AU - Polichetti, T

AU - Alfano, B.

AU - Massera, E.

AU - Sarro, Lina

N1 - Conference code: 15

PY - 2016

Y1 - 2016

N2 - The work herein presented investigates the behavior of graphene-based gas sensors realized by using an innovative way to prepare graphene. The sensing layer was directly grown by chemical vapor deposition on pre-patterned CMOS compatible Mo catalyst and then it was eased on the underlying SiO2 through a completely transfer-free process. Devices with different geometries were designed and tested towards NO2 and NH3 in environmental conditions, i.e. room temperature and relative humidity set at 50%. Furthermore, these gas sensors were also calibrated, resulting in the ability to detect concentrations down to 240 ppb and 17 ppm of NO2 and NH3, respectively. These results are in agreement with the best performances reported in literature for graphene-based sensors. They not only confirm the successful devices fabrication through the transfer-free approach, but also pave the route for large-scale production of MEMS/NEMS sensors.

AB - The work herein presented investigates the behavior of graphene-based gas sensors realized by using an innovative way to prepare graphene. The sensing layer was directly grown by chemical vapor deposition on pre-patterned CMOS compatible Mo catalyst and then it was eased on the underlying SiO2 through a completely transfer-free process. Devices with different geometries were designed and tested towards NO2 and NH3 in environmental conditions, i.e. room temperature and relative humidity set at 50%. Furthermore, these gas sensors were also calibrated, resulting in the ability to detect concentrations down to 240 ppb and 17 ppm of NO2 and NH3, respectively. These results are in agreement with the best performances reported in literature for graphene-based sensors. They not only confirm the successful devices fabrication through the transfer-free approach, but also pave the route for large-scale production of MEMS/NEMS sensors.

KW - graphene-based gas sensors

KW - environmental conditions

KW - chemical vapor deposition

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M3 - Conference contribution

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BT - 2016 IEEE Sensors Proceedings

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PB - IEEE

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T2 - IEEE Sensors 2016

Y2 - 30 October 2016 through 2 November 2016

ER -

High sensitive gas sensors realized by a transfer-free process of CVD graphene

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Keywords

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