High sensitive gas sensors realized by a transfer-free process of CVD graphene

Filiberto Ricciardella, Sten Vollebregt, T Polichetti, B. Alfano, E. Massera, Lina Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

15 Citations (Scopus)
86 Downloads (Pure)

Abstract

The work herein presented investigates the behavior of graphene-based gas sensors realized by using an innovative way to prepare graphene. The sensing layer was directly grown by chemical vapor deposition on pre-patterned CMOS compatible Mo catalyst and then it was eased on the underlying SiO2 through a completely transfer-free process. Devices with different geometries were designed and tested towards NO2 and NH3 in environmental conditions, i.e. room temperature and relative humidity set at 50%. Furthermore, these gas sensors were also calibrated, resulting in the ability to detect concentrations down to 240 ppb and 17 ppm of NO2 and NH3, respectively. These results are in agreement with the best performances reported in literature for graphene-based sensors. They not only confirm the successful devices fabrication through the transfer-free approach, but also pave the route for large-scale production of MEMS/NEMS sensors.
Original languageEnglish
Title of host publication2016 IEEE Sensors Proceedings
EditorsE. Fontana, C. Ruiz-Zamarreno
Place of PublicationPiscataway, NJ
PublisherIEEE
Pages697-699
Number of pages3
ISBN (Electronic)978-1-4799-8287-5
DOIs
Publication statusPublished - 2016
EventIEEE Sensors 2016: 15th IEEE Sensors Conference - Caribe Royale All-Suite Hotel and Convention Center, Orlando, FL, United States
Duration: 30 Oct 20162 Nov 2016
Conference number: 15

Conference

ConferenceIEEE Sensors 2016
Country/TerritoryUnited States
CityOrlando, FL
Period30/10/162/11/16

Bibliographical note

Accepted author manuscript

Keywords

  • graphene-based gas sensors
  • environmental conditions
  • chemical vapor deposition
  • transfer-free process

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