High-sensitivity high-stability silicon photodiodes for DUV, VUV and EUV spectral ranges

L Shi; S Nihtianov; LK Nanver; F Scholze; A Gottwald

High-sensitivity high-stability silicon photodiodes for DUV, VUV and EUV spectral ranges

L Shi, S Nihtianov, LK Nanver, F Scholze, A Gottwald

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

21 Citations (Scopus)

Original language	English
Title of host publication	Proc. SPIE 8145, 81450N (2011)
Editors	OH Siegmund
Place of Publication	San Diego, CA, USA
Publisher	SPIE
Pages	1-9
Number of pages	9
Publication status	Published - 2011
Event	SPIE 2011 Optics + photonics - San Diego, CA, USA Duration: 21 Aug 2011 → 25 Aug 2011

Publication series

Name
Publisher	SPIE

Name	Proceedings of SPIE- International Society for Optical Engineering
Volume	8145
ISSN (Print)	0277-786X

Conference

Conference	SPIE 2011 Optics + photonics
Period	21/08/11 → 25/08/11

Keywords

Elektrotechniek
Techniek
conference contrib. refereed
Conf.proc. > 3 pag

Cite this

@inproceedings{7de624a8ada245569b5f219a712df554,

title = "High-sensitivity high-stability silicon photodiodes for DUV, VUV and EUV spectral ranges",

keywords = "Elektrotechniek, Techniek, conference contrib. refereed, Conf.proc. > 3 pag",

author = "L Shi and S Nihtianov and LK Nanver and F Scholze and A Gottwald",

year = "2011",

language = "English",

publisher = "SPIE",

pages = "1--9",

editor = "OH Siegmund",

booktitle = "Proc. SPIE 8145, 81450N (2011)",

address = "United States",

note = "SPIE 2011 Optics + photonics ; Conference date: 21-08-2011 Through 25-08-2011",

}

High-sensitivity high-stability silicon photodiodes for DUV, VUV and EUV spectral ranges. / Shi, L; Nihtianov, S; Nanver, LK et al.
Proc. SPIE 8145, 81450N (2011). ed. / OH Siegmund. San Diego, CA, USA: SPIE, 2011. p. 1-9 (Proceedings of SPIE- International Society for Optical Engineering; Vol. 8145).

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - High-sensitivity high-stability silicon photodiodes for DUV, VUV and EUV spectral ranges

AU - Shi, L

AU - Nihtianov, S

AU - Nanver, LK

AU - Scholze, F

AU - Gottwald, A

PY - 2011

Y1 - 2011

KW - Elektrotechniek

KW - Techniek

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

UR - http://spiedigitallibrary.org/proceedings/resource/2/psisdg/8145/1/81450N_1

M3 - Conference contribution

SP - 1

EP - 9

BT - Proc. SPIE 8145, 81450N (2011)

A2 - Siegmund, OH

PB - SPIE

CY - San Diego, CA, USA

T2 - SPIE 2011 Optics + photonics

Y2 - 21 August 2011 through 25 August 2011

ER -

High-sensitivity high-stability silicon photodiodes for DUV, VUV and EUV spectral ranges

Publication series

Conference

Keywords

Other files and links

Cite this