High-sensitivity high-stability silicon photodiodes for DUV, VUV and EUV spectral ranges

L Shi, S Nihtianov, LK Nanver, F Scholze, A Gottwald

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

17 Citations (Scopus)
Original languageEnglish
Title of host publicationProc. SPIE 8145, 81450N (2011)
EditorsOH Siegmund
Place of PublicationSan Diego, CA, USA
PublisherSPIE
Pages1-9
Number of pages9
Publication statusPublished - 2011
EventSPIE 2011 Optics + photonics - San Diego, CA, USA
Duration: 21 Aug 201125 Aug 2011

Publication series

Name
PublisherSPIE
NameProceedings of SPIE- International Society for Optical Engineering
Volume8145
ISSN (Print)0277-786X

Conference

ConferenceSPIE 2011 Optics + photonics
Period21/08/1125/08/11

Keywords

  • Elektrotechniek
  • Techniek
  • conference contrib. refereed
  • Conf.proc. > 3 pag

Cite this