High Speed anisotropic dry etching of CoNbZr for next generation magnetic recording.

MSP Andriesse, T Zijlstra, EWJM van der Drift

Research output: Book/Report › Report › Professional

Original language	Undefined/Unknown
Place of Publication	Delft
Publisher	Delft University of Technology
Number of pages	14
Volume	Progress Report
Publication status	Published - 2000

Name
Publisher	TU Delft

Keywords

@book{3b45212e49e14453bd418ea1dbb9de7b,

title = "High Speed anisotropic dry etching of CoNbZr for next generation magnetic recording.",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "MSP Andriesse and T Zijlstra and {van der Drift}, EWJM",

year = "2000",

language = "Undefined/Unknown",

volume = "Progress Report",

publisher = "Delft University of Technology",

address = "Netherlands",

}

TY - BOOK

T1 - High Speed anisotropic dry etching of CoNbZr for next generation magnetic recording.

AU - Andriesse, MSP

AU - Zijlstra, T

AU - van der Drift, EWJM

PY - 2000

Y1 - 2000

KW - ZX Int.klas.verslagjaar < 2002

M3 - Report

VL - Progress Report

BT - High Speed anisotropic dry etching of CoNbZr for next generation magnetic recording.

PB - Delft University of Technology

CY - Delft

ER -