High Speed anisotropic dry etching of CoNbZr for next generation magnetic recording.

MSP Andriesse, T Zijlstra, EWJM van der Drift

Research output: Book/ReportReportProfessional

17 Citations (Scopus)
Original languageUndefined/Unknown
Place of PublicationDelft
PublisherDelft University of Technology
Number of pages14
VolumeProgress Report
Publication statusPublished - 2000

Publication series

PublisherTU Delft


  • ZX Int.klas.verslagjaar < 2002

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