High speed atomic force microscopy for wafer inspection

A Keyvani Janbahan, H Sadeghian Marnani, MS Tamer, JFL Goosen, F van Keulen

Research output: Contribution to conference › Abstract › Scientific

Original language	English
Pages	1-2
Number of pages	2
Publication status	Published - 2014
Event	NMC 2014, Madrid, Spain - Madrid, Spain Duration: 30 Apr 2014 → 2 May 2014

Conference	NMC 2014, Madrid, Spain
Period	30/04/14 → 2/05/14

NEO

Cite this

@conference{aabec9ca94234f35a8d0542888817e1a,

title = "High speed atomic force microscopy for wafer inspection",

author = "{Keyvani Janbahan}, A and {Sadeghian Marnani}, H and MS Tamer and JFL Goosen and {van Keulen}, F",

note = "NEO; NMC 2014, Madrid, Spain ; Conference date: 30-04-2014 Through 02-05-2014",

year = "2014",

language = "English",

pages = "1--2",

}