High temperature CVD deposition of thin polycrystalline silicon layers

A Petit; M Zeman

High temperature CVD deposition of thin polycrystalline silicon layers

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	SAFE 2001: proceedings CD-ROM
Place of Publication	Utrecht
Publisher	STW Technology Foundation
Pages	150-153
Number of pages	4
ISBN (Print)	90-73461-29-4
Publication status	Published - 2001
Event	Semiconductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology, Veldhoven - Utrecht Duration: 28 Nov 2001 → 30 Nov 2001

Publication series

Name
Publisher	STW technology foundation

Conference

Conference	Semiconductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology, Veldhoven
Period	28/11/01 → 30/11/01

Keywords

ZX Int.klas.verslagjaar < 2002

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Cite this

@inproceedings{a4cabaaf70a24934aea64ab328cdb29b,

title = "High temperature CVD deposition of thin polycrystalline silicon layers",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "A Petit and M Zeman",

year = "2001",

language = "Undefined/Unknown",

isbn = "90-73461-29-4",

publisher = "STW Technology Foundation",

pages = "150--153",

booktitle = "SAFE 2001: proceedings CD-ROM",

note = "Semiconductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology, Veldhoven ; Conference date: 28-11-2001 Through 30-11-2001",

}

TY - GEN

T1 - High temperature CVD deposition of thin polycrystalline silicon layers

AU - Petit, A

AU - Zeman, M

PY - 2001

Y1 - 2001

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SN - 90-73461-29-4

SP - 150

EP - 153

BT - SAFE 2001: proceedings CD-ROM

PB - STW Technology Foundation

CY - Utrecht

T2 - Semiconductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology, Veldhoven

Y2 - 28 November 2001 through 30 November 2001

ER -