High throughput defect detection with multiple parallel beams

HMP Himbergen, M.D. Nijkerk, P.W.H. Jager, de, TC Hosman, P Kruit

    Research output: Contribution to journalArticleScientificpeer-review

    12 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)2521-2525
    Number of pages5
    JournalJournal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
    Volume25
    Issue number6
    Publication statusPublished - 2007

    Keywords

    • academic journal papers
    • CWTS 0.75 <= JFIS < 2.00

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