High throughput electron lithography with the MAPPER concept

Research output: Contribution to journalArticleScientificpeer-review

20 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)3177-3180
Number of pages4
JournalJournal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
Volume16
Issue number6
Publication statusPublished - 1998

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