High throughput electron lithography with the MAPPER concept

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	3177-3180
Number of pages	4
Journal	Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
Volume	16
Issue number	6
Publication status	Published - 1998

Cite this

@article{65ccb69f5c1d407da3538314a15b40f4,

title = "High throughput electron lithography with the MAPPER concept",

author = "P Kruit",

year = "1998",

language = "Undefined/Unknown",

volume = "16",

pages = "3177--3180",

journal = "Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures",

issn = "1071-1023",

publisher = "AVS Science and Technology Society",

number = "6",

}

TY - JOUR

T1 - High throughput electron lithography with the MAPPER concept

AU - Kruit, P

PY - 1998

Y1 - 1998

M3 - Article

SN - 1071-1023

VL - 16

SP - 3177

EP - 3180

JO - Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures

IS - 6

ER -