Horizontally aligned carbon nanotube scaffolds for freestanding structures with enhanced conductivity

Cinzia Silvestri; Federico Marciano; Bruno Morana; Violeta Podranovic; Sten Vollebregt; Guo Qi Zhang; Pasqualina M. Sarro

Horizontally aligned carbon nanotube scaffolds for freestanding structures with enhanced conductivity

Cinzia Silvestri^*, Federico Marciano, Bruno Morana, Violeta Podranovic, Sten Vollebregt, Guo Qi Zhang, Pasqualina M. Sarro

^*Corresponding author for this work

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

1 Citation (Scopus)

Abstract

An unprecedented enhancement in electrical conductivity of horizontally aligned carbon nanotube (HA-CNT) structures using a 10 nm conformal coating of alumina (Al₂O₃) or amorphous silicon carbide (a-SiC) is presented. By combining the capability to grow long vertically aligned CNTs (VA-CNTs) with a liquid-assisted flattening technique, dense arrays of HA-CNTs exhibiting a high degree of alignment are realized and integrated at wafer-scale. Suspended structures, ranging from large area membranes to narrow beams, can be fabricated. The impressive enhancement in electrical conductivity, approximately 209% for the Al₂O₃ coated HA-CNTs (Al₂O₃/HA-CNTs) and 2276% for the a-SiC ones (a-SiC/HA-CNTs), demonstrates the potential of CNT-based scaffolds as scalable and functional building blocks for suspended interconnects, heat spreaders and novel chemical and optical sensors.

Original language	English
Title of host publication	MEMS 2017
Subtitle of host publication	2017 IEEE 30th International Conference on Micro Electro Mechanical Systems
Place of Publication	Piscataway, NJ
Publisher	IEEE
Pages	266-269
Number of pages	4
ISBN (Electronic)	978-1-5090-5078-9
Publication status	Published - 2017
Event	MEMS 2017: 30th IEEE International Conference on Micro Electro Mechanical Systems - Rio Las Vegas Hotel and Casino, Las Vegas, NV, United States Duration: 22 Jan 2017 → 26 Jan 2017 Conference number: 30

Conference

Conference	MEMS 2017
Abbreviated title	IEEE MEMS 2017
Country/Territory	United States
City	Las Vegas, NV
Period	22/01/17 → 26/01/17

Keywords

Coatings
Carbon nanotubes
Aluminium oxide
Conductivity
Optical sensors
Morphology
Fabrication

Cite this

@inproceedings{065d2163a9ad439ab8917ff40c34a4a3,

title = "Horizontally aligned carbon nanotube scaffolds for freestanding structures with enhanced conductivity",

abstract = "An unprecedented enhancement in electrical conductivity of horizontally aligned carbon nanotube (HA-CNT) structures using a 10 nm conformal coating of alumina (Al2O3) or amorphous silicon carbide (a-SiC) is presented. By combining the capability to grow long vertically aligned CNTs (VA-CNTs) with a liquid-assisted flattening technique, dense arrays of HA-CNTs exhibiting a high degree of alignment are realized and integrated at wafer-scale. Suspended structures, ranging from large area membranes to narrow beams, can be fabricated. The impressive enhancement in electrical conductivity, approximately 209% for the Al2O3 coated HA-CNTs (Al2O3/HA-CNTs) and 2276% for the a-SiC ones (a-SiC/HA-CNTs), demonstrates the potential of CNT-based scaffolds as scalable and functional building blocks for suspended interconnects, heat spreaders and novel chemical and optical sensors.",

keywords = "Coatings, Carbon nanotubes, Aluminium oxide, Conductivity, Optical sensors, Morphology, Fabrication",

author = "Cinzia Silvestri and Federico Marciano and Bruno Morana and Violeta Podranovic and Sten Vollebregt and Zhang, {Guo Qi} and Sarro, {Pasqualina M.}",

year = "2017",

language = "English",

pages = "266--269",

booktitle = "MEMS 2017",

publisher = "IEEE",

address = "United States",

note = "MEMS 2017 : 30th IEEE International Conference on Micro Electro Mechanical Systems, IEEE MEMS 2017 ; Conference date: 22-01-2017 Through 26-01-2017",

}

Silvestri, C, Marciano, F, Morana, B, Podranovic, V, Vollebregt, S , Zhang, GQ & Sarro, PM 2017, Horizontally aligned carbon nanotube scaffolds for freestanding structures with enhanced conductivity. in MEMS 2017: 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems., 7863392, IEEE, Piscataway, NJ, pp. 266-269, MEMS 2017, Las Vegas, NV, United States, 22/01/17.

Horizontally aligned carbon nanotube scaffolds for freestanding structures with enhanced conductivity. / Silvestri, Cinzia; Marciano, Federico; Morana, Bruno et al.
MEMS 2017: 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems. Piscataway, NJ: IEEE, 2017. p. 266-269 7863392.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Horizontally aligned carbon nanotube scaffolds for freestanding structures with enhanced conductivity

AU - Silvestri, Cinzia

AU - Marciano, Federico

AU - Morana, Bruno

AU - Podranovic, Violeta

AU - Vollebregt, Sten

AU - Zhang, Guo Qi

AU - Sarro, Pasqualina M.

N1 - Conference code: 30

PY - 2017

Y1 - 2017

N2 - An unprecedented enhancement in electrical conductivity of horizontally aligned carbon nanotube (HA-CNT) structures using a 10 nm conformal coating of alumina (Al2O3) or amorphous silicon carbide (a-SiC) is presented. By combining the capability to grow long vertically aligned CNTs (VA-CNTs) with a liquid-assisted flattening technique, dense arrays of HA-CNTs exhibiting a high degree of alignment are realized and integrated at wafer-scale. Suspended structures, ranging from large area membranes to narrow beams, can be fabricated. The impressive enhancement in electrical conductivity, approximately 209% for the Al2O3 coated HA-CNTs (Al2O3/HA-CNTs) and 2276% for the a-SiC ones (a-SiC/HA-CNTs), demonstrates the potential of CNT-based scaffolds as scalable and functional building blocks for suspended interconnects, heat spreaders and novel chemical and optical sensors.

AB - An unprecedented enhancement in electrical conductivity of horizontally aligned carbon nanotube (HA-CNT) structures using a 10 nm conformal coating of alumina (Al2O3) or amorphous silicon carbide (a-SiC) is presented. By combining the capability to grow long vertically aligned CNTs (VA-CNTs) with a liquid-assisted flattening technique, dense arrays of HA-CNTs exhibiting a high degree of alignment are realized and integrated at wafer-scale. Suspended structures, ranging from large area membranes to narrow beams, can be fabricated. The impressive enhancement in electrical conductivity, approximately 209% for the Al2O3 coated HA-CNTs (Al2O3/HA-CNTs) and 2276% for the a-SiC ones (a-SiC/HA-CNTs), demonstrates the potential of CNT-based scaffolds as scalable and functional building blocks for suspended interconnects, heat spreaders and novel chemical and optical sensors.

KW - Coatings

KW - Carbon nanotubes

KW - Aluminium oxide

KW - Conductivity

KW - Optical sensors

KW - Morphology

KW - Fabrication

UR - http://www.scopus.com/inward/record.url?scp=85015724786&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:85015724786

SP - 266

EP - 269

BT - MEMS 2017

PB - IEEE

CY - Piscataway, NJ

T2 - MEMS 2017

Y2 - 22 January 2017 through 26 January 2017

ER -

Horizontally aligned carbon nanotube scaffolds for freestanding structures with enhanced conductivity

Abstract

Conference

Keywords

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