Hot-plate emitter with distributed heating for high mid-IR output

Amir Ghaderi, Yaonian Cui, Peter Enoksson, Reinoud F. Wolffenbuttel*

*Corresponding author for this work

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Abstract

A suspended polySi heater is presented for use as a mid-IR light source in a microspectrometer based on a linearly variable optical filter (LVOF). Distributed electrical powering of a segmented structure with a specially designed suspension system is used for obtaining a temperature profile that is constant over the length of the element with a peak temperature significantly higher as compared to the conventional on-chip hot-wires. The integrated LVOF design results in an enhanced spectral emission and facilitates the use in the composition measurement of liquids and gases by absorption spectroscopy.

Original languageEnglish
Title of host publicationComputational Optical Sensing and Imaging, COSI 2020
PublisherOSA - The Optical Society
ISBN (Electronic)9781557528209
Publication statusPublished - 2020
EventComputational Optical Sensing and Imaging, COSI 2020 - Part of Imaging and Applied Optics Congress 2020 - Virtual, Online, United States
Duration: 22 Jun 202026 Jun 2020

Publication series

NameOptics InfoBase Conference Papers

Conference

ConferenceComputational Optical Sensing and Imaging, COSI 2020 - Part of Imaging and Applied Optics Congress 2020
Country/TerritoryUnited States
CityVirtual, Online
Period22/06/2026/06/20

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