Hot-wire CVD poly-silicon films for thin film devices.

JK Rath, FD Tichelaar, H Meiling, REI Schropp

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

104 Citations (Scopus)

Original language	Undefined/Unknown
Title of host publication	"Amorphous and Microcrystalline Silicon Technology".
Editors	R Schropp, HM Branz, M Hack, I Shimizu, S Wagner
Pages	879-890
Number of pages	12
Publication status	Published - 1999

Cite this

@inproceedings{76561348d4e34c8d8b642e840f7a18d3,

title = "Hot-wire CVD poly-silicon films for thin film devices.",

author = "JK Rath and FD Tichelaar and H Meiling and REI Schropp",

year = "1999",

language = "Undefined/Unknown",

pages = "879--890",

editor = "R Schropp and HM Branz and M Hack and I Shimizu and S Wagner",

booktitle = "{"}Amorphous and Microcrystalline Silicon Technology{"}.",

}