Hot-wire CVD poly-silicon films for thin film devices.

JK Rath, FD Tichelaar, H Meiling, REI Schropp

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

    104 Citations (Scopus)
    Original languageUndefined/Unknown
    Title of host publication"Amorphous and Microcrystalline Silicon Technology".
    EditorsR Schropp, HM Branz, M Hack, I Shimizu, S Wagner
    Number of pages12
    Publication statusPublished - 1999

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