How accurate is the Fabry-Perot approximation in high-finesse linear variable optical filters for gas absorption spectroscopy?

N. Pelin Ayerden; Reinoud F. Wolffenbuttel

doi:10.1109/TRANSDUCERS.2017.7994491

How accurate is the Fabry-Perot approximation in high-finesse linear variable optical filters for gas absorption spectroscopy?

N. Pelin Ayerden, Reinoud F. Wolffenbuttel

Electronic Instrumentation

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

3 Citations (Scopus)

Abstract

The biggest challenge in the miniaturization of spectrometers is achieving high sensitivity and resolving power at reduced device dimensions. The gas-filled linear variable optical filter (LVOF) enhances the interaction between the light and the sample, thereby improving the sensitivity in a small footprint, by using the resonator cavity of a wideband interference filter also as the gas cell
in a wafer-level implementation. The demanding operating conditions of the gas-filled LVOF renders the conventional approximation of the tapered resonator into an array of Fabry-Perot filters invalid. A novel design method using the Fizeau interferometer approach is
described and demonstrated with measurements.

Original language	Undefined/Unknown
Title of host publication	Transducers 2017
Subtitle of host publication	19th International Conference on Solid-State Sensors, Actuators and Microsystems
Editors	W. Fang, C.P. Hung, S. Shoji
Place of Publication	Piscataway, NJ
Publisher	IEEE
Pages	2111-2114
Number of pages	4
ISBN (Electronic)	978-1-5386-2731-0
ISBN (Print)	978-1-5386-2732-7
DOIs	https://doi.org/10.1109/TRANSDUCERS.2017.7994491
Publication status	Published - 2017
Event	Transducers 2017: 19th International Conference on Solid-State Sensors, Actuators and Microsystems - Kaohsiung, Taiwan Duration: 18 Jun 2017 → 22 Jun 2017

Conference

Conference	Transducers 2017
Abbreviated title	Transducers'17
Country/Territory	Taiwan
City	Kaohsiung
Period	18/06/17 → 22/06/17

Bibliographical note

W3P.099

Keywords

Fabry-Perot interferometers
cavity resonators
gas sensors
optical filters
Fabry-Perot approximation
Fizeau interferometer
gas absorption spectroscopy
gas-filled linear variable optical filter
high-finesse linear variable optical filters
resonator cavity
wideband interference filter
Absorption
Cavity resonators
Mirrors
Optical filters
Optical interferometry
Optical resonators
Resonator filters
Fabry Perot
linear variable optical filter
optical absorption spectroscopy

Access to Document

10.1109/TRANSDUCERS.2017.7994491

Cite this

Ayerden, N. P., & Wolffenbuttel, R. F. (2017). How accurate is the Fabry-Perot approximation in high-finesse linear variable optical filters for gas absorption spectroscopy? In W. Fang, C. P. Hung, & S. Shoji (Eds.), Transducers 2017: 19th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 2111-2114). IEEE. https://doi.org/10.1109/TRANSDUCERS.2017.7994491

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title = "How accurate is the Fabry-Perot approximation in high-finesse linear variable optical filters for gas absorption spectroscopy?",

abstract = "The biggest challenge in the miniaturization of spectrometers is achieving high sensitivity and resolving power at reduced device dimensions. The gas-filled linear variable optical filter (LVOF) enhances the interaction between the light and the sample, thereby improving the sensitivity in a small footprint, by using the resonator cavity of a wideband interference filter also as the gas cellin a wafer-level implementation. The demanding operating conditions of the gas-filled LVOF renders the conventional approximation of the tapered resonator into an array of Fabry-Perot filters invalid. A novel design method using the Fizeau interferometer approach isdescribed and demonstrated with measurements.",

keywords = "Fabry-Perot interferometers, cavity resonators, gas sensors, optical filters, Fabry-Perot approximation, Fizeau interferometer, gas absorption spectroscopy, gas-filled linear variable optical filter, high-finesse linear variable optical filters, resonator cavity, wideband interference filter, Absorption, Cavity resonators, Mirrors, Optical filters, Optical interferometry, Optical resonators, Resonator filters, Fabry Perot, linear variable optical filter, optical absorption spectroscopy",

author = "Ayerden, {N. Pelin} and Wolffenbuttel, {Reinoud F.}",

note = "W3P.099; Transducers 2017 ; Conference date: 18-06-2017 Through 22-06-2017",

year = "2017",

doi = "10.1109/TRANSDUCERS.2017.7994491",

language = "Undefined/Unknown",

isbn = "978-1-5386-2732-7",

pages = "2111--2114",

editor = "W. Fang and C.P. Hung and S. Shoji",

booktitle = "Transducers 2017",

publisher = "IEEE",

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}

Ayerden, NP & Wolffenbuttel, RF 2017, How accurate is the Fabry-Perot approximation in high-finesse linear variable optical filters for gas absorption spectroscopy? in W Fang, CP Hung & S Shoji (eds), Transducers 2017: 19th International Conference on Solid-State Sensors, Actuators and Microsystems. IEEE, Piscataway, NJ, pp. 2111-2114, Transducers 2017, Kaohsiung, Taiwan, 18/06/17. https://doi.org/10.1109/TRANSDUCERS.2017.7994491

How accurate is the Fabry-Perot approximation in high-finesse linear variable optical filters for gas absorption spectroscopy? / Ayerden, N. Pelin; Wolffenbuttel, Reinoud F.
Transducers 2017: 19th International Conference on Solid-State Sensors, Actuators and Microsystems. ed. / W. Fang; C.P. Hung; S. Shoji. Piscataway, NJ: IEEE, 2017. p. 2111-2114.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review