How accurate is the Fabry-Perot approximation in high-finesse linear variable optical filters for gas absorption spectroscopy?

N. Pelin Ayerden, Reinoud F. Wolffenbuttel

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

2 Citations (Scopus)

Abstract

The biggest challenge in the miniaturization of spectrometers is achieving high sensitivity and resolving power at reduced device dimensions. The gas-filled linear variable optical filter (LVOF) enhances the interaction between the light and the sample, thereby improving the sensitivity in a small footprint, by using the resonator cavity of a wideband interference filter also as the gas cell
in a wafer-level implementation. The demanding operating conditions of the gas-filled LVOF renders the conventional approximation of the tapered resonator into an array of Fabry-Perot filters invalid. A novel design method using the Fizeau interferometer approach is
described and demonstrated with measurements.
Original languageUndefined/Unknown
Title of host publicationTransducers 2017
Subtitle of host publication19th International Conference on Solid-State Sensors, Actuators and Microsystems
EditorsW. Fang, C.P. Hung, S. Shoji
Place of PublicationPiscataway, NJ
PublisherIEEE
Pages2111-2114
Number of pages4
ISBN (Electronic)978-1-5386-2731-0
ISBN (Print)978-1-5386-2732-7
DOIs
Publication statusPublished - 2017
EventTransducers 2017: 19th International Conference on Solid-State Sensors, Actuators and Microsystems - Kaohsiung, Taiwan
Duration: 18 Jun 201722 Jun 2017

Conference

ConferenceTransducers 2017
Abbreviated titleTransducers'17
CountryTaiwan
CityKaohsiung
Period18/06/1722/06/17

Keywords

  • Fabry-Perot interferometers
  • cavity resonators
  • gas sensors
  • optical filters
  • Fabry-Perot approximation
  • Fizeau interferometer
  • gas absorption spectroscopy
  • gas-filled linear variable optical filter
  • high-finesse linear variable optical filters
  • resonator cavity
  • wideband interference filter
  • Absorption
  • Cavity resonators
  • Mirrors
  • Optical filters
  • Optical interferometry
  • Optical resonators
  • Resonator filters
  • Fabry Perot
  • linear variable optical filter
  • optical absorption spectroscopy

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