Humidity sensor based on multi-layer graphene (MLG) integrated onto a micro-hotplate (MHP)

Leandro Nicolas  Sacco; Hanxing  Meng; Sten Vollebregt

doi:10.1109/SENSORS52175.2022.9967039

Humidity sensor based on multi-layer graphene (MLG) integrated onto a micro-hotplate (MHP)

Leandro Nicolas Sacco, Hanxing Meng, Sten Vollebregt

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

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Abstract

This work demonstrates a humidity sensor based on two multi-layered graphene (MLG) strips monolithically integrated onto a micro-hotplate (MHP). A transfer-free approach was adopted to release the graphene from the catalyst to reduce device variations and ensure scalability. The sensing performance of the device was tested by exposing the device to humidity levels in the range of 10% to 84% of relative humidity (RH). Both MLG strips present a linear response over this range. The micro-heater implementation is vital to fully desorb water molecules from the MLG surface. The micro-heater was powered with 31 mW to reach 140°C in the MHP zone. The sensitivity of the devices is of the order of 1000 pp/RH[%]. The developed device aims at providing a robust and reliable gas sensors platform based on MLG.

Original language	English
Title of host publication	Proceedings of the 2022 IEEE Sensors
Place of Publication	Piscataway
Publisher	IEEE
Pages	1-4
Number of pages	4
ISBN (Electronic)	978-1-6654-8464-0
ISBN (Print)	978-1-6654-8465-7
DOIs	https://doi.org/10.1109/SENSORS52175.2022.9967039
Publication status	Published - 2022
Event	2022 IEEE Sensors - Dallas, United States Duration: 30 Oct 2022 → 2 Nov 2022

Publication series

Name	Proceedings of IEEE Sensors
Volume	2022-October
ISSN (Print)	1930-0395
ISSN (Electronic)	2168-9229

Conference

Conference	2022 IEEE Sensors
Country/Territory	United States
City	Dallas
Period	30/10/22 → 2/11/22

Bibliographical note

Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care
Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

Keywords

Multi-layer graphene
microheater
humidity sensing
transfer-free graphene
gas sensors

Access to Document

10.1109/SENSORS52175.2022.9967039

Humidity_sensor_based_on_multi-layer_graphene_MLG_integrated_onto_a_micro-hotplate_MHPFinal published version, 1.39 MB

Cite this

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title = "Humidity sensor based on multi-layer graphene (MLG) integrated onto a micro-hotplate (MHP)",

abstract = "This work demonstrates a humidity sensor based on two multi-layered graphene (MLG) strips monolithically integrated onto a micro-hotplate (MHP). A transfer-free approach was adopted to release the graphene from the catalyst to reduce device variations and ensure scalability. The sensing performance of the device was tested by exposing the device to humidity levels in the range of 10% to 84% of relative humidity (RH). Both MLG strips present a linear response over this range. The micro-heater implementation is vital to fully desorb water molecules from the MLG surface. The micro-heater was powered with 31 mW to reach 140°C in the MHP zone. The sensitivity of the devices is of the order of 1000 pp/RH[%]. The developed device aims at providing a robust and reliable gas sensors platform based on MLG.",

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Humidity sensor based on multi-layer graphene (MLG) integrated onto a micro-hotplate (MHP). / Sacco, Leandro Nicolas ; Meng, Hanxing ; Vollebregt, Sten.
Proceedings of the 2022 IEEE Sensors. Piscataway: IEEE, 2022. p. 1-4 (Proceedings of IEEE Sensors; Vol. 2022-October).

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

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N1 - Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

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N2 - This work demonstrates a humidity sensor based on two multi-layered graphene (MLG) strips monolithically integrated onto a micro-hotplate (MHP). A transfer-free approach was adopted to release the graphene from the catalyst to reduce device variations and ensure scalability. The sensing performance of the device was tested by exposing the device to humidity levels in the range of 10% to 84% of relative humidity (RH). Both MLG strips present a linear response over this range. The micro-heater implementation is vital to fully desorb water molecules from the MLG surface. The micro-heater was powered with 31 mW to reach 140°C in the MHP zone. The sensitivity of the devices is of the order of 1000 pp/RH[%]. The developed device aims at providing a robust and reliable gas sensors platform based on MLG.

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Humidity sensor based on multi-layer graphene (MLG) integrated onto a micro-hotplate (MHP)

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Keywords

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