Hybrid Navier-Stokes/DSMC gas flow simulations in very low pressure thin film deposition

G Abbate, BJ Thijsse, CR Kleijn

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Proceedings of the 25th international symposium on rarefied gas dynamics
Editors	MS Ivanov, AK Rebrov
Place of Publication	Novosibirsk
Publisher	House of the Siberian Branch of the Russian Academy of Science
Pages	830-835
Number of pages	6
ISBN (Print)	978-5-7692-0924-6
Publication status	Published - 2007
Event	ISRGF - Novosibirsk Duration: 21 Jul 2007 → 28 Jul 2007

Name
Publisher	House of the Siberian Branch of the Russian Academy of Science

Conference	ISRGF
Period	21/07/07 → 28/07/07

Keywords

@inproceedings{259ce4b429ec4fd183beb1bd30e02ac8,

title = "Hybrid Navier-Stokes/DSMC gas flow simulations in very low pressure thin film deposition",

keywords = "Conf.proc. > 3 pag",

author = "G Abbate and BJ Thijsse and CR Kleijn",

year = "2007",

language = "Undefined/Unknown",

isbn = "978-5-7692-0924-6",

publisher = "House of the Siberian Branch of the Russian Academy of Science",

pages = "830--835",

editor = "MS Ivanov and AK Rebrov",

booktitle = "Proceedings of the 25th international symposium on rarefied gas dynamics",

note = "ISRGF ; Conference date: 21-07-2007 Through 28-07-2007",

}

Hybrid Navier-Stokes/DSMC gas flow simulations in very low pressure thin film deposition. / Abbate, G; Thijsse, BJ; Kleijn, CR.
Proceedings of the 25th international symposium on rarefied gas dynamics. ed. / MS Ivanov; AK Rebrov. Novosibirsk: House of the Siberian Branch of the Russian Academy of Science, 2007. p. 830-835.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Hybrid Navier-Stokes/DSMC gas flow simulations in very low pressure thin film deposition

AU - Abbate, G

AU - Thijsse, BJ

AU - Kleijn, CR

PY - 2007

Y1 - 2007

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 978-5-7692-0924-6

SP - 830

EP - 835

BT - Proceedings of the 25th international symposium on rarefied gas dynamics

A2 - Ivanov, MS

A2 - Rebrov, AK

PB - House of the Siberian Branch of the Russian Academy of Science

CY - Novosibirsk

T2 - ISRGF

Y2 - 21 July 2007 through 28 July 2007

ER -