Hybrid wafer-level packaging based on a capping substrate with cavities

S Sosin, J Tian, M Bartek

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	The 20th European Conference on Solid-State Transducers (Eurosensors XX)
Editors	s.n.
Place of Publication	Goeteborg
Publisher	Chalmers University of Technology
Pages	M3CP6/1-M3CP6/4
ISBN (Print)	91-631-9281-0
Publication status	Published - 2006
Event	The 20th European Conference on Solid-State Transducers (Eurosensors XX) - Goteborg, Sweden Duration: 17 Sept 2006 → 20 Sept 2006

Name
Publisher	Chalmers University of Technology

Conference	The 20th European Conference on Solid-State Transducers (Eurosensors XX)
Period	17/09/06 → 20/09/06

Keywords

@inproceedings{ef37f218eac84878bdcb43517125063d,

title = "Hybrid wafer-level packaging based on a capping substrate with cavities",

keywords = "conference contrib. refereed, Conf.proc. > 3 pag",

author = "S Sosin and J Tian and M Bartek",

year = "2006",

language = "Undefined/Unknown",

isbn = "91-631-9281-0",

publisher = "Chalmers University of Technology",

pages = "M3CP6/1--M3CP6/4",

editor = "s.n.",

booktitle = "The 20th European Conference on Solid-State Transducers (Eurosensors XX)",

note = "The 20th European Conference on Solid-State Transducers (Eurosensors XX) ; Conference date: 17-09-2006 Through 20-09-2006",

}

Hybrid wafer-level packaging based on a capping substrate with cavities. / Sosin, S; Tian, J; Bartek, M.
The 20th European Conference on Solid-State Transducers (Eurosensors XX). ed. / s.n. Goeteborg: Chalmers University of Technology, 2006. p. M3CP6/1-M3CP6/4.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Hybrid wafer-level packaging based on a capping substrate with cavities

AU - Sosin, S

AU - Tian, J

AU - Bartek, M

PY - 2006

Y1 - 2006

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 91-631-9281-0

SP - M3CP6/1-M3CP6/4

BT - The 20th European Conference on Solid-State Transducers (Eurosensors XX)

A2 - s.n., null

PB - Chalmers University of Technology

CY - Goeteborg

T2 - The 20th European Conference on Solid-State Transducers (Eurosensors XX)

Y2 - 17 September 2006 through 20 September 2006

ER -