Hybrid wafer-level packaging for RF-MEMS and optoelectronic applications

J Tian

    Research output: ThesisDissertation (TU Delft)

    Original languageEnglish
    QualificationDoctor of Philosophy
    Awarding Institution
    • Delft University of Technology
    Supervisors/Advisors
    • Burghartz, JN, Supervisor
    • Bartek, Marian, Advisor
    Award date9 Apr 2013
    Print ISBNs978-94-6203-330-6
    DOIs
    Publication statusPublished - 2013

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