Hybrid wafer-level packaging scheme for RF-MEMS

S Sosin, J Tian, M Bartek

    Research output: Contribution to conference › Abstract › Scientific

    Original languageUndefined/Unknown
    Pages139-139
    Number of pages1
    Publication statusPublished - 2006

    Keywords

    • conference contrib. non-refer.
    • Geen BTA classificatie

    Cite this