Hydrogen injection in ETP plasma jet for fast-deposition of high-quality a-Si:H

AMHN Petit, RACMM van Swaaij, MCM van de Sanden

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationSymposium proceedings amorphous and nanocrystalline silicon science and technology - 2004
EditorsG Ganguly, M Kondo, EA Schiff, R Carius, R Biswas
Place of PublicationWarrendale, USA
PublisherMaterials Research Society
Pages1-6
Number of pages6
Publication statusPublished - 2004
EventAmorphous and nanocrystalline silicon science and technology - 2004, San Francisco, CA. USA - Warrendale, USA
Duration: 13 Apr 200416 Apr 2004

Publication series

Name
PublisherMaterials Research Society
Name
Volume808

Conference

ConferenceAmorphous and nanocrystalline silicon science and technology - 2004, San Francisco, CA. USA
Period13/04/0416/04/04

Keywords

  • Conf.proc. > 3 pag

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