Hydrogen injection in ETP plasma jet for fast-deposition of high-quality a-Si:H

AMHN Petit; RACMM van Swaaij; MCM van de Sanden

Hydrogen injection in ETP plasma jet for fast-deposition of high-quality a-Si:H

AMHN Petit, RACMM van Swaaij, MCM van de Sanden

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Symposium proceedings amorphous and nanocrystalline silicon science and technology - 2004
Editors	G Ganguly, M Kondo, EA Schiff, R Carius, R Biswas
Place of Publication	Warrendale, USA
Publisher	Materials Research Society
Pages	1-6
Number of pages	6
Publication status	Published - 2004
Event	Amorphous and nanocrystalline silicon science and technology - 2004, San Francisco, CA. USA - Warrendale, USA Duration: 13 Apr 2004 → 16 Apr 2004

Publication series

Name
Publisher	Materials Research Society

Name
Volume	808

Conference

Conference	Amorphous and nanocrystalline silicon science and technology - 2004, San Francisco, CA. USA
Period	13/04/04 → 16/04/04

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 7 Affordable and Clean Energy

Keywords

Conf.proc. > 3 pag

Cite this

@inproceedings{a49ec87be320454a822df8dc5d8f503e,

title = "Hydrogen injection in ETP plasma jet for fast-deposition of high-quality a-Si:H",

keywords = "Conf.proc. > 3 pag",

author = "AMHN Petit and {van Swaaij}, RACMM and {van de Sanden}, MCM",

year = "2004",

language = "Undefined/Unknown",

publisher = "Materials Research Society",

pages = "1--6",

editor = "G Ganguly and M Kondo and EA Schiff and R Carius and R Biswas",

booktitle = "Symposium proceedings amorphous and nanocrystalline silicon science and technology - 2004",

address = "United States",

note = "Amorphous and nanocrystalline silicon science and technology - 2004, San Francisco, CA. USA ; Conference date: 13-04-2004 Through 16-04-2004",

}

Petit, AMHN, van Swaaij, RACMM & van de Sanden, MCM 2004, Hydrogen injection in ETP plasma jet for fast-deposition of high-quality a-Si:H. in G Ganguly, M Kondo, EA Schiff, R Carius & R Biswas (eds), Symposium proceedings amorphous and nanocrystalline silicon science and technology - 2004. Materials Research Society, Warrendale, USA, pp. 1-6, Amorphous and nanocrystalline silicon science and technology - 2004, San Francisco, CA. USA, 13/04/04.

Hydrogen injection in ETP plasma jet for fast-deposition of high-quality a-Si:H. / Petit, AMHN; van Swaaij, RACMM; van de Sanden, MCM.
Symposium proceedings amorphous and nanocrystalline silicon science and technology - 2004. ed. / G Ganguly; M Kondo; EA Schiff; R Carius; R Biswas. Warrendale, USA: Materials Research Society, 2004. p. 1-6.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Hydrogen injection in ETP plasma jet for fast-deposition of high-quality a-Si:H

AU - Petit, AMHN

AU - van Swaaij, RACMM

AU - van de Sanden, MCM

PY - 2004

Y1 - 2004

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SP - 1

EP - 6

BT - Symposium proceedings amorphous and nanocrystalline silicon science and technology - 2004

A2 - Ganguly, G

A2 - Kondo, M

A2 - Schiff, EA

A2 - Carius, R

A2 - Biswas, R

PB - Materials Research Society

CY - Warrendale, USA

T2 - Amorphous and nanocrystalline silicon science and technology - 2004, San Francisco, CA. USA

Y2 - 13 April 2004 through 16 April 2004

ER -