IC-compatible fabrication of linear variable optical filters for micro-spectrometer

A Emadi, HW Wu, S Grabarnik, G de Graaf, RF Wolffenbuttel

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Proceedings of Eurosensors 2009
Editors	s.n.
Place of Publication	lausanne, switzerland
Publisher	Eurosensors
Pages	1-4
Number of pages	4
ISBN (Print)	1876-6196
Publication status	Published - 2009
Event	Eurosensors 2009 - lausanne, switzerland Duration: 6 Sept 2009 → 9 Sept 2009

Name
Publisher	Eurosensors

Conference	Eurosensors 2009
Period	6/09/09 → 9/09/09

Keywords

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title = "IC-compatible fabrication of linear variable optical filters for micro-spectrometer",

keywords = "conference contrib. refereed, Conf.proc. > 3 pag",

author = "A Emadi and HW Wu and S Grabarnik and {de Graaf}, G and RF Wolffenbuttel",

year = "2009",

language = "Undefined/Unknown",

isbn = "1876-6196",

publisher = "Eurosensors",

pages = "1--4",

editor = "s.n.",

booktitle = "Proceedings of Eurosensors 2009",

note = "Eurosensors 2009 ; Conference date: 06-09-2009 Through 09-09-2009",

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TY - GEN

T1 - IC-compatible fabrication of linear variable optical filters for micro-spectrometer

AU - Emadi, A

AU - Wu, HW

AU - Grabarnik, S

AU - de Graaf, G

AU - Wolffenbuttel, RF

PY - 2009

Y1 - 2009

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 1876-6196

SP - 1

EP - 4

BT - Proceedings of Eurosensors 2009

A2 - s.n., null

PB - Eurosensors

CY - lausanne, switzerland

T2 - Eurosensors 2009

Y2 - 6 September 2009 through 9 September 2009

ER -