IC-compatible fabrication of linear variable optical filters for micro-spectrometer

A Emadi, HW Wu, S Grabarnik, G de Graaf, RF Wolffenbuttel

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Original languageUndefined/Unknown
Title of host publicationProceedings of Eurosensors 2009
Editors s.n.
Place of Publicationlausanne, switzerland
PublisherEurosensors
Pages1-4
Number of pages4
ISBN (Print)1876-6196
Publication statusPublished - 2009
EventEurosensors 2009 - lausanne, switzerland
Duration: 6 Sep 20099 Sep 2009

Publication series

Name
PublisherEurosensors

Conference

ConferenceEurosensors 2009
Period6/09/099/09/09

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

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