IC-compatible process for pattern transfer in deep wells for integration of RF components

PN Pham, PM Sarro, JN Burghartz

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

19 Citations (Scopus)

Original language	Undefined/Unknown
Title of host publication	Proceedings of SPIE, vol. 4174
Editors	J-M Karam, J Yasaitis
Place of Publication	Bellingham
Publisher	International Society for Optical Engineering
Pages	390-397
Number of pages	8
ISBN (Print)	0-8194-3830-8
Publication status	Published - 2000
Event	Micromachining and Microfabrication Pocess Technology VI, Santa Clara - Bellingham Duration: 18 Sept 2000 → 20 Sept 2000

Name
Publisher	International Society for Optical Engineering

Conference	Micromachining and Microfabrication Pocess Technology VI, Santa Clara
Period	18/09/00 → 20/09/00

Keywords

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title = "IC-compatible process for pattern transfer in deep wells for integration of RF components",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "PN Pham and PM Sarro and JN Burghartz",

year = "2000",

language = "Undefined/Unknown",

isbn = "0-8194-3830-8",

publisher = "International Society for Optical Engineering",

pages = "390--397",

editor = "{J-M Karam} and {J Yasaitis}",

booktitle = "Proceedings of SPIE, vol. 4174",

note = "Micromachining and Microfabrication Pocess Technology VI, Santa Clara ; Conference date: 18-09-2000 Through 20-09-2000",

}

IC-compatible process for pattern transfer in deep wells for integration of RF components. / Pham, PN; Sarro, PM; Burghartz, JN.
Proceedings of SPIE, vol. 4174. ed. / J-M Karam; J Yasaitis. Bellingham: International Society for Optical Engineering, 2000. p. 390-397.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - IC-compatible process for pattern transfer in deep wells for integration of RF components

AU - Pham, PN

AU - Sarro, PM

AU - Burghartz, JN

PY - 2000

Y1 - 2000

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SN - 0-8194-3830-8

SP - 390

EP - 397

BT - Proceedings of SPIE, vol. 4174

A2 - J-M Karam, null

A2 - J Yasaitis, null

PB - International Society for Optical Engineering

CY - Bellingham

T2 - Micromachining and Microfabrication Pocess Technology VI, Santa Clara

Y2 - 18 September 2000 through 20 September 2000

ER -