@inproceedings{d09108d8b52e4d47845ed74805217de8,
title = "IC-compatible processing of inertial sensors using SF6-O2 cryogenic plasma process",
keywords = "Conf.proc. > 3 pag",
author = "G Craciun and H Yang and L Pakula and MA Blauw and {van der Drift}, EWJM and PJ French",
note = "CD-rom; IEEE Sensors 2003 ; Conference date: 22-10-2003 Through 24-10-2003",
year = "2003",
language = "Undefined/Unknown",
isbn = "0-7803-8133-5",
pages = "440--444",
editor = "s.n.",
booktitle = "IEEE Sensors 2003",
publisher = "IEEE Society",
}