IC-compatible two-level bulk micromachining for RF components

PN Pham; TK Ng; JMW Laros; TLM Scholtes; PM Sarro; JN Burghartz

IC-compatible two-level bulk micromachining for RF components

PN Pham, TK Ng, JMW Laros, TLM Scholtes, PM Sarro, JN Burghartz

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	SAFE99: proceedings. ProRISC99: proceedings [CD-ROM]
Place of Publication	Utrecht
Publisher	STW Technology Foundation
Pages	359-362
Number of pages	4
ISBN (Print)	90-73461-18-9
Publication status	Published - 1999
Event	2nd Annual Workshop on Semiconductor Advances for Future Electronics. IEEE 10th Annual Workshop on Circuits, Systems and Signal Processing, Mierlo - Utrecht Duration: 24 Nov 1999 → 25 Nov 1999

Publication series

Name
Publisher	STW technology foundation

Conference

Conference	2nd Annual Workshop on Semiconductor Advances for Future Electronics. IEEE 10th Annual Workshop on Circuits, Systems and Signal Processing, Mierlo
Period	24/11/99 → 25/11/99

Keywords

ZX Int.klas.verslagjaar < 2002

Cite this

@inproceedings{657185b493ac46e795175985f3fb7034,

title = "IC-compatible two-level bulk micromachining for RF components",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "PN Pham and TK Ng and JMW Laros and TLM Scholtes and PM Sarro and JN Burghartz",

year = "1999",

language = "Undefined/Unknown",

isbn = "90-73461-18-9",

publisher = "STW Technology Foundation",

pages = "359--362",

booktitle = "SAFE99: proceedings. ProRISC99: proceedings [CD-ROM]",

note = "2nd Annual Workshop on Semiconductor Advances for Future Electronics. IEEE 10th Annual Workshop on Circuits, Systems and Signal Processing, Mierlo ; Conference date: 24-11-1999 Through 25-11-1999",

}

Pham, PN, Ng, TK, Laros, JMW , Scholtes, TLM , Sarro, PM & Burghartz, JN 1999, IC-compatible two-level bulk micromachining for RF components. in SAFE99: proceedings. ProRISC99: proceedings [CD-ROM]. STW Technology Foundation, Utrecht, pp. 359-362, 2nd Annual Workshop on Semiconductor Advances for Future Electronics. IEEE 10th Annual Workshop on Circuits, Systems and Signal Processing, Mierlo, 24/11/99.

TY - GEN

T1 - IC-compatible two-level bulk micromachining for RF components

AU - Pham, PN

AU - Ng, TK

AU - Laros, JMW

AU - Scholtes, TLM

AU - Sarro, PM

AU - Burghartz, JN

PY - 1999

Y1 - 1999

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SN - 90-73461-18-9

SP - 359

EP - 362

BT - SAFE99: proceedings. ProRISC99: proceedings [CD-ROM]

PB - STW Technology Foundation

CY - Utrecht

T2 - 2nd Annual Workshop on Semiconductor Advances for Future Electronics. IEEE 10th Annual Workshop on Circuits, Systems and Signal Processing, Mierlo

Y2 - 24 November 1999 through 25 November 1999

ER -