IC-compatible two-level bulk micromachining for RF silicon technology

PN Pham, PM Sarro, TK Ng, JN Burghartz

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

7 Citations (Scopus)

Original language	Undefined/Unknown
Title of host publication	ESSDERC 2000 proceedings
Editors	WA Lane, T Watanabe
Place of Publication	S.l.
Publisher	Frontier Group
Pages	204-207
Number of pages	4
ISBN (Print)	2-86332-248-6
Publication status	Published - 2000
Event	30th European Solid-State Device Research Conference, Cork - S.l. Duration: 11 Sept 2000 → 13 Sept 2000

Name
Publisher	Frontier Group

Conference	30th European Solid-State Device Research Conference, Cork
Period	11/09/00 → 13/09/00

Keywords

@inproceedings{234381fcf4984cc8a74fea0fc224f2a9,

title = "IC-compatible two-level bulk micromachining for RF silicon technology",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "PN Pham and PM Sarro and TK Ng and JN Burghartz",

year = "2000",

language = "Undefined/Unknown",

isbn = "2-86332-248-6",

publisher = "Frontier Group",

pages = "204--207",

editor = "{WA Lane} and {T Watanabe}",

booktitle = "ESSDERC 2000 proceedings",

note = "30th European Solid-State Device Research Conference, Cork ; Conference date: 11-09-2000 Through 13-09-2000",

}

TY - GEN

T1 - IC-compatible two-level bulk micromachining for RF silicon technology

AU - Pham, PN

AU - Sarro, PM

AU - Ng, TK

AU - Burghartz, JN

PY - 2000

Y1 - 2000

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SN - 2-86332-248-6

SP - 204

EP - 207

BT - ESSDERC 2000 proceedings

A2 - WA Lane, null

A2 - T Watanabe, null

PB - Frontier Group

CY - S.l.

T2 - 30th European Solid-State Device Research Conference, Cork

Y2 - 11 September 2000 through 13 September 2000

ER -