IC-compatible two-level bulk micromachining process module for RF silicon technology

PN Pham, PM Sarro, TK Ng, JN Burghartz

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	1756-1764
Number of pages	9
Journal	IEEE Transactions on Electron Devices
Volume	48
Issue number	8
Publication status	Published - 2001

Keywords

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title = "IC-compatible two-level bulk micromachining process module for RF silicon technology",

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AU - Sarro, PM

AU - Ng, TK

AU - Burghartz, JN

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KW - ZX Int.klas.verslagjaar < 2002

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