IC-compatible two-level bulk micromachining process module for RF silicon technology

PN Pham, PM Sarro, TK Ng, JN Burghartz

Research output: Contribution to journalArticleScientificpeer-review

31 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)1756-1764
Number of pages9
JournalIEEE Transactions on Electron Devices
Volume48
Issue number8
Publication statusPublished - 2001

Keywords

  • ZX Int.klas.verslagjaar < 2002

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