@article{a6ffa068b8c841579b5c77c0cc1b392d,
title = "IC fabrication-compatible processing for instrumentation and measurement applications",
keywords = "Elektrotechniek, Techniek, ZX CWTS JFIS < 1.00",
author = "DDL Wijngaards and RF Wolffenbuttel",
year = "2001",
language = "Undefined/Unknown",
volume = "50",
pages = "1475--1484",
journal = "IEEE Transactions on Instrumentation and Measurement",
issn = "0018-9456",
publisher = "Institute of Electrical and Electronics Engineers (IEEE)",
number = "6",
}