Identification and visualization of robust-control-relevant model sets with application to an industrial wafer stage

T Oomen, S Quist, RAP van Herpen, OH Bosgra

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

13 Citations (Scopus)

Original language	English
Title of host publication	Proceedings of the 49th IEEE Conference of Decision and Control
Editors	M.W. Spong
Place of Publication	Atlanta, USA
Publisher	CDC
Pages	5530-5535
Number of pages	6
ISBN (Print)	978-1-4244-7744-9
Publication status	Published - 2010
Event	The 49th IEEE Conference of Decision and Control, Atlanta, USA - Atlanta, USA Duration: 15 Dec 2010 → 17 Dec 2010

Name
Publisher	CDC 2010

Conference	The 49th IEEE Conference of Decision and Control, Atlanta, USA
Period	15/12/10 → 17/12/10

Keywords

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title = "Identification and visualization of robust-control-relevant model sets with application to an industrial wafer stage",

keywords = "Conf.proc. > 3 pag",

author = "T Oomen and S Quist and {van Herpen}, RAP and OH Bosgra",

year = "2010",

language = "English",

isbn = "978-1-4244-7744-9",

publisher = "CDC",

pages = "5530--5535",

editor = "M.W. Spong",

booktitle = "Proceedings of the 49th IEEE Conference of Decision and Control",

note = "The 49th IEEE Conference of Decision and Control, Atlanta, USA ; Conference date: 15-12-2010 Through 17-12-2010",

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Identification and visualization of robust-control-relevant model sets with application to an industrial wafer stage. / Oomen, T; Quist, S; van Herpen, RAP et al.
Proceedings of the 49th IEEE Conference of Decision and Control. ed. / M.W. Spong. Atlanta, USA: CDC, 2010. p. 5530-5535.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Identification and visualization of robust-control-relevant model sets with application to an industrial wafer stage

AU - Oomen, T

AU - Quist, S

AU - van Herpen, RAP

AU - Bosgra, OH

PY - 2010

Y1 - 2010

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 978-1-4244-7744-9

SP - 5530

EP - 5535

BT - Proceedings of the 49th IEEE Conference of Decision and Control

A2 - Spong, M.W.

PB - CDC

CY - Atlanta, USA

T2 - The 49th IEEE Conference of Decision and Control, Atlanta, USA

Y2 - 15 December 2010 through 17 December 2010

ER -