Identification and visualization of robust-control-relevant model sets with application to an industrial wafer stage

T Oomen, S Quist, RAP van Herpen, OH Bosgra

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

7 Citations (Scopus)
Original languageEnglish
Title of host publicationProceedings of the 49th IEEE Conference of Decision and Control
EditorsM.W. Spong
Place of PublicationAtlanta, USA
PublisherCDC
Pages5530-5535
Number of pages6
ISBN (Print)978-1-4244-7744-9
Publication statusPublished - 2010
EventThe 49th IEEE Conference of Decision and Control, Atlanta, USA - Atlanta, USA
Duration: 15 Dec 201017 Dec 2010

Publication series

Name
PublisherCDC 2010

Conference

ConferenceThe 49th IEEE Conference of Decision and Control, Atlanta, USA
Period15/12/1017/12/10

Keywords

  • Conf.proc. > 3 pag

Cite this

Oomen, T., Quist, S., van Herpen, RAP., & Bosgra, OH. (2010). Identification and visualization of robust-control-relevant model sets with application to an industrial wafer stage. In M. W. Spong (Ed.), Proceedings of the 49th IEEE Conference of Decision and Control (pp. 5530-5535). CDC.