Illumination system for electron beam lithography tool.

V Katsap (Inventor), WK Waskiewicz (Inventor), D Moonen (Inventor), P Kruit (Inventor)

    Research output: Patent

    Original languageUndefined/Unknown
    Patent number1199987
    IPCOktober 1999
    Priority date1/01/00
    Publication statusPublished - 1999

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