| Original language | Undefined/Unknown |
|---|---|
| Patent number | 1199987 |
| IPC | Oktober 1999 |
| Priority date | 1/01/00 |
| Publication status | Published - 1999 |
Illumination system for electron beam lithography tool.
V Katsap (Inventor), WK Waskiewicz (Inventor), D Moonen (Inventor), P Kruit (Inventor)
Research output: Patent