| Original language | Undefined/Unknown |
|---|---|
| Patent number | US 633508 B1 |
| Priority date | 25/12/01 |
| Publication status | Published - 2001 |
Illumination system for electron beam lithograpy tool.
V Katsap (Inventor), P Kruit (Inventor), D Moonen (Inventor), W Waskiewics (Inventor)
Research output: Patent