Imaging and Nanofabrication With the Helium Ion Microscope of the Van Leeuwenhoek Laboratory in Delft

PFA Alkemade, EM Koster, E van Veldhoven, D.J. Maas

Research output: Contribution to journalArticleScientificpeer-review

36 Citations (Scopus)
Original languageEnglish
Pages (from-to)90-100
Number of pages11
JournalScanning: the journal of scanning microscopies
Volume34
Issue number2
Publication statusPublished - 2012

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