Imaging and Nanofabrication With the Helium Ion Microscope of the Van Leeuwenhoek Laboratory in Delft

PFA Alkemade, EM Koster, E van Veldhoven, D.J. Maas

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	English
Pages (from-to)	90-100
Number of pages	11
Journal	Scanning: the journal of scanning microscopies
Volume	34
Issue number	2
Publication status	Published - 2012

Cite this

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title = "Imaging and Nanofabrication With the Helium Ion Microscope of the Van Leeuwenhoek Laboratory in Delft",

author = "PFA Alkemade and EM Koster and Veldhoven, {E van} and D.J. Maas",

year = "2012",

language = "English",

volume = "34",

pages = "90--100",

journal = "Scanning: the journal of scanning microscopies",

issn = "0161-0457",

publisher = "John Wiley & Sons",

number = "2",

}

TY - JOUR

T1 - Imaging and Nanofabrication With the Helium Ion Microscope of the Van Leeuwenhoek Laboratory in Delft

AU - Alkemade, PFA

AU - Koster, EM

AU - Veldhoven, E van

AU - Maas, D.J.

PY - 2012

Y1 - 2012

M3 - Article

SN - 0161-0457

VL - 34

SP - 90

EP - 100

JO - Scanning: the journal of scanning microscopies

JF - Scanning: the journal of scanning microscopies

IS - 2

ER -