Imaging systems in the Delft Multi-Beam Scanning Electron Microscope 1

Yan Ren

Research output: ThesisDissertation (TU Delft)

49 Downloads (Pure)

Abstract

The goal of this Ph.D. research is to develop imaging systems for the multiple beam scanning electron microscope (MBSEM) built in Delft University of Technology. This thesis includes two imaging systems, transmission electron (TE) imaging system, and secondary electron (SE) imaging system. The major conclusions, key results and some suggestions for future improvements are highlighted in this chapter.
Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • Delft University of Technology
Supervisors/Advisors
  • Kruit, P., Supervisor
Award date9 Oct 2017
Print ISBNs9789462957114
DOIs
Publication statusPublished - 2017

Keywords

  • Multi-beam SEM (MBSEM)
  • Transmission electron imaging
  • Secondary electron imaging

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