Imaging systems in the Delft Multi-Beam Scanning Electron Microscope 1

Yan Ren

doi:10.4233/uuid:e25ff43d-b8ae-4b6c-9bc9-d10768c4ab11

Imaging systems in the Delft Multi-Beam Scanning Electron Microscope 1

Yan Ren

Research output: Thesis › Dissertation (TU Delft)

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Abstract

The goal of this Ph.D. research is to develop imaging systems for the multiple beam scanning electron microscope (MBSEM) built in Delft University of Technology. This thesis includes two imaging systems, transmission electron (TE) imaging system, and secondary electron (SE) imaging system. The major conclusions, key results and some suggestions for future improvements are highlighted in this chapter.

Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Delft University of Technology
Supervisors/Advisors	Kruit, P., Supervisor
Award date	9 Oct 2017
Print ISBNs	9789462957114
DOIs	https://doi.org/10.4233/uuid:e25ff43d-b8ae-4b6c-9bc9-d10768c4ab11
Publication status	Published - 2017

Keywords

Multi-beam SEM (MBSEM)
Transmission electron imaging
Secondary electron imaging

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10.4233/uuid:e25ff43d-b8ae-4b6c-9bc9-d10768c4ab11

Yan Ren Thesis 20170912Final published version, 8.13 MB

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title = "Imaging systems in the Delft Multi-Beam Scanning Electron Microscope 1",

abstract = "The goal of this Ph.D. research is to develop imaging systems for the multiple beam scanning electron microscope (MBSEM) built in Delft University of Technology. This thesis includes two imaging systems, transmission electron (TE) imaging system, and secondary electron (SE) imaging system. The major conclusions, key results and some suggestions for future improvements are highlighted in this chapter.",

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AB - The goal of this Ph.D. research is to develop imaging systems for the multiple beam scanning electron microscope (MBSEM) built in Delft University of Technology. This thesis includes two imaging systems, transmission electron (TE) imaging system, and secondary electron (SE) imaging system. The major conclusions, key results and some suggestions for future improvements are highlighted in this chapter.

KW - Multi-beam SEM (MBSEM)

KW - Transmission electron imaging

KW - Secondary electron imaging

UR - http://resolver.tudelft.nl/uuid:e25ff43d-b8ae-4b6c-9bc9-d10768c4ab11

U2 - 10.4233/uuid:e25ff43d-b8ae-4b6c-9bc9-d10768c4ab11

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M3 - Dissertation (TU Delft)

SN - 9789462957114

ER -

Imaging systems in the Delft Multi-Beam Scanning Electron Microscope 1

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Keywords

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