Imaging systems in the Delft Multi-Beam Scanning Electron Microscope 1

Yan Ren

    Research output: ThesisDissertation (TU Delft)

    90 Downloads (Pure)

    Abstract

    The goal of this Ph.D. research is to develop imaging systems for the multiple beam scanning electron microscope (MBSEM) built in Delft University of Technology. This thesis includes two imaging systems, transmission electron (TE) imaging system, and secondary electron (SE) imaging system. The major conclusions, key results and some suggestions for future improvements are highlighted in this chapter.
    Original languageEnglish
    QualificationDoctor of Philosophy
    Awarding Institution
    • Delft University of Technology
    Supervisors/Advisors
    • Kruit, P., Supervisor
    Award date9 Oct 2017
    Print ISBNs9789462957114
    DOIs
    Publication statusPublished - 2017

    Keywords

    • Multi-beam SEM (MBSEM)
    • Transmission electron imaging
    • Secondary electron imaging

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