The goal of this Ph.D. research is to develop imaging systems for the multiple beam scanning electron microscope (MBSEM) built in Delft University of Technology. This thesis includes two imaging systems, transmission electron (TE) imaging system, and secondary electron (SE) imaging system. The major conclusions, key results and some suggestions for future improvements are highlighted in this chapter.
|Qualification||Doctor of Philosophy|
|Award date||9 Oct 2017|
|Publication status||Published - 2017|
- Multi-beam SEM (MBSEM)
- Transmission electron imaging
- Secondary electron imaging