Impact of fabrication technology on flexural resonances of silicon nitride cantilevers

K Babaei Gavan, HJR Westra, EWJM van der Drift, WJ Venstra, HSJ van der Zant

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

11 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publicationMicroelectronic engineering
EditorsM Rossum, van
Place of PublicationEuropa
PublisherElsevier
Pages1216-1218
Number of pages3
ISBN (Print)0167-9317
Publication statusPublished - 2009
Event34th Conference on Micro and nano Engineering - Europa
Duration: 15 Sep 200818 Sep 2008

Publication series

Name
PublisherElsevier
NameMicroelectronic Engineering
Volume86
ISSN (Print)0167-9317

Conference

Conference34th Conference on Micro and nano Engineering
Period15/09/0818/09/08

Keywords

  • conference contrib. refereed
  • Geen BTA classificatie

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