@inproceedings{6872a78d4d8546379164c4044b2fd815,
title = "Improved Evaluation of CMUT Collapse and Snapback Voltages via Charge Control using Fast Dynamic Current Excitation",
abstract = "This work describes a method to estimate the mean collapse and snapback voltages of CMUT elements and their statistical distribution by extracting the voltage-dependent capacitance from fast dynamic excitation of the device, enabling fast analysis of fabrication-related intra-element and inter-element variability. While both voltage excitation and current excitation of the CMUT element provide comparable array-level results in terms of mean and deviation of positive and negative collapse and snapback voltages, it is demonstrated that improved detection of isolated collapse and snapback events is achieved through current-driven excitation, implementing charge-controlled actuation of the membranes.",
keywords = "CMUTs, Collapse voltage, Nonuniformity, Snapback voltage, Source Measure Unit, Variability",
author = "{La Mura}, Monica and Khan, {Muhammad Usman} and Marta Saccher and {Van Schaijk}, Rob and Savoia, {Alessandro Stuart}",
note = "Green Open Access added to TU Delft Institutional Repository as part of the Taverne amendment. More information about this copyright law amendment can be found at https://www.openaccess.nl. Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public. ; 2025 IEEE International Ultrasonics Symposium, IUS 2025 ; Conference date: 15-09-2025 Through 18-09-2025",
year = "2025",
doi = "10.1109/IUS62464.2025.11201590",
language = "English",
series = "IEEE International Ultrasonics Symposium, IUS",
publisher = "IEEE",
booktitle = "2025 IEEE International Ultrasonics Symposium, IUS 2025",
address = "United States",
}