Improved in plane thermal folded V-beam actuator for optical fibre alignment

VA Henneken, WP Sassen, M Tichem, PM Sarro

Research output: Contribution to journalArticleScientificpeer-review

19 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)1-9
Number of pages9
JournalJournal of Micromechanics and Microengineering
Volume18
Publication statusPublished - 2008

Keywords

  • academic journal papers
  • CWTS 0.75 <= JFIS < 2.00

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