Improved in plane thermal folded V-beam actuator for optical fibre alignment

VA Henneken, WP Sassen, M Tichem, PM Sarro

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	1-9
Number of pages	9
Journal	Journal of Micromechanics and Microengineering
Volume	18
Publication status	Published - 2008

Keywords

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title = "Improved in plane thermal folded V-beam actuator for optical fibre alignment",

keywords = "academic journal papers, CWTS 0.75 <= JFIS < 2.00",

author = "VA Henneken and WP Sassen and M Tichem and PM Sarro",

year = "2008",

language = "Undefined/Unknown",

volume = "18",

pages = "1--9",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

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}

TY - JOUR

T1 - Improved in plane thermal folded V-beam actuator for optical fibre alignment

AU - Henneken, VA

AU - Sassen, WP

AU - Tichem, M

AU - Sarro, PM

PY - 2008

Y1 - 2008

KW - academic journal papers

KW - CWTS 0.75 <= JFIS < 2.00

M3 - Article

SN - 0960-1317

VL - 18

SP - 1

EP - 9

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

ER -