Improved PECVD processed hydrogenated germanium films through temperature induced densification

Thierry de Vrijer, Julian E.C. van Dingen, Paul J. Roelandschap, Koos Roodenburg, Arno H.M. Smets

Research output: Contribution to journal › Article › Scientific › peer-review

5 Citations (Scopus)
75 Downloads (Pure)

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Material Science