Improved theoretical reflectivities of extreme ultraviolet mirrors.

M Singh, JJM Braat

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Proceedings of the 25th SPIE Symposium on Microlithography
Pages	412-419
Number of pages	8
Publication status	Published - 2000

Name

Name
Volume	3997

Proceedings. SPIE

Keywords

@inproceedings{3077e32591404832bf3e3ec64b6043b1,

title = "Improved theoretical reflectivities of extreme ultraviolet mirrors.",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "M Singh and JJM Braat",

note = "Proceedings. SPIE",

year = "2000",

language = "Undefined/Unknown",

pages = "412--419",

booktitle = "Proceedings of the 25th SPIE Symposium on Microlithography",

}