Improved theoretical reflectivities of extreme ultraviolet mirrors.

M Singh, JJM Braat

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

6 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publicationProceedings of the 25th SPIE Symposium on Microlithography
Pages412-419
Number of pages8
Publication statusPublished - 2000

Publication series

Name
Name
Volume3997

Keywords

  • ZX Int.klas.verslagjaar < 2002

Cite this