Improved thermal U-beam actuators for micro-assembly

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	298-305
Number of pages	8
Journal	Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers
Volume	142
Publication status	Published - 2008

Keywords

@article{67f5f12440134eb49c6ae298fa2ccb14,

title = "Improved thermal U-beam actuators for micro-assembly",

keywords = "academic journal papers, CWTS 0.75 <= JFIS < 2.00",

author = "VA Henneken and M Tichem and PM Sarro",

year = "2008",

language = "Undefined/Unknown",

volume = "142",

pages = "298--305",

journal = "Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers",

issn = "0924-4247",

publisher = "Elsevier",

}

TY - JOUR

T1 - Improved thermal U-beam actuators for micro-assembly

AU - Henneken, VA

AU - Tichem, M

AU - Sarro, PM

PY - 2008

Y1 - 2008

KW - academic journal papers

KW - CWTS 0.75 <= JFIS < 2.00

M3 - Article

SN - 0924-4247

VL - 142

SP - 298

EP - 305

JO - Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers

JF - Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers

ER -