Improved Thermal U-beam Actuators for Micro-assembly

VA Henneken, M Tichem, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationXX Eurosensors
Editors s.l
Place of PublicationGöteborg
PublisherChalmers University of Technology
Pages1-4
Number of pages4
ISBN (Print)91-631-9281-0
Publication statusPublished - 2006
EventXX Eurosensors - Göteborg
Duration: 17 Sept 200620 Sept 2006

Publication series

Name
PublisherChalmers (= TU Göteborg)

Conference

ConferenceXX Eurosensors
Period17/09/0620/09/06

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

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