Improvement of wettability of silicon nitride in PECVD environment for copper electrodeposition in HAR vias

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	SAFE 2007 Semiconductor advances for future electornics
Editors	s.n.
Place of Publication	Veldhoven, The Netherlands
Publisher	STW
Pages	543-546
Number of pages	4
ISBN (Print)	978-90-73461-49-
Publication status	Published - 2007

Name
Publisher	STW

Keywords

@inproceedings{6fc1a38e64b84f199646d617f00b182c,

title = "Improvement of wettability of silicon nitride in PECVD environment for copper electrodeposition in HAR vias",

keywords = "conference contrib. refereed, Vakpubl., Overig wet. > 3 pag",

author = "M Saadaoui and WHA Wien and {van Zeijl}, HW and {van Bogaard}, A and PM Sarro",

year = "2007",

language = "Undefined/Unknown",

isbn = "978-90-73461-49-",

publisher = "STW",

pages = "543--546",

editor = "s.n.",

booktitle = "SAFE 2007 Semiconductor advances for future electornics",

}

Improvement of wettability of silicon nitride in PECVD environment for copper electrodeposition in HAR vias. / Saadaoui, M; Wien, WHA ; van Zeijl, HW et al.
SAFE 2007 Semiconductor advances for future electornics. ed. / s.n. Veldhoven, The Netherlands: STW, 2007. p. 543-546.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Improvement of wettability of silicon nitride in PECVD environment for copper electrodeposition in HAR vias

AU - Saadaoui, M

AU - Wien, WHA

AU - van Zeijl, HW

AU - van Bogaard, A

AU - Sarro, PM

PY - 2007

Y1 - 2007

KW - conference contrib. refereed

KW - Vakpubl., Overig wet. > 3 pag

M3 - Conference contribution

SN - 978-90-73461-49-

SP - 543

EP - 546

BT - SAFE 2007 Semiconductor advances for future electornics

A2 - s.n., null

PB - STW

CY - Veldhoven, The Netherlands

ER -