Improving the Speed of AFM by Mechatronic Design and Modern Control Methods.

G Schitter

Research output: Contribution to journalArticleScientificpeer-review

25 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)266-273
Number of pages8
JournalTechnisches Messen - TM
Volume76(5)
Publication statusPublished - 2009

Keywords

  • CWTS JFIS < 0.75

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