Improving the speed of SPM by modern control methods

G Schitter

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Proceedings of the 53th international conference on precision measurement
Editors	Jäger,G
Place of Publication	Limenau Österreich
Publisher	ICPM
Pages	1-5
Number of pages	5
ISBN (Print)	978-3-938843-40-6
Publication status	Published - 2008
Event	53th international conference on precision measurement - Limenau Österreich Duration: 8 Sep 2008 → 12 Sep 2008

Name
Publisher	ICPM

Conference	53th international conference on precision measurement
Period	8/09/08 → 12/09/08

Keywords

@inproceedings{ad47f974b61d4802ac099d9e90ea06b4,

title = "Improving the speed of SPM by modern control methods",

keywords = "Conf.proc. > 3 pag",

author = "G Schitter",

year = "2008",

language = "Undefined/Unknown",

isbn = "978-3-938843-40-6",

publisher = "ICPM",

pages = "1--5",

editor = "J{\"a}ger,G",

booktitle = "Proceedings of the 53th international conference on precision measurement",

note = "null ; Conference date: 08-09-2008 Through 12-09-2008",

}

TY - GEN

T1 - Improving the speed of SPM by modern control methods

AU - Schitter, G

PY - 2008

Y1 - 2008

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 978-3-938843-40-6

SP - 1

EP - 5

BT - Proceedings of the 53th international conference on precision measurement

A2 - Jäger,G, null

PB - ICPM

CY - Limenau Österreich

Y2 - 8 September 2008 through 12 September 2008

ER -