In-package MEMS-based thermal actuators for micro-assembly

VA Henneken, M Tichem, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationProceedings MME 2005
EditorsRF Wolffenbuttel, e.a.
Place of Publications.l.
PublisherInform Trycket AB
Pages284-287
Number of pages4
Publication statusPublished - 2005
EventThe 16th Workshop on Micromachining, Micromechanics and Microsystems , Gotenborg, Sweden - Göteborg, Sweden
Duration: 4 Sep 20056 Sep 2005

Publication series

Name
PublisherInform Trycket AB

Conference

ConferenceThe 16th Workshop on Micromachining, Micromechanics and Microsystems , Gotenborg, Sweden
Period4/09/056/09/05

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

Cite this

Henneken, VA., Tichem, M., & Sarro, PM. (2005). In-package MEMS-based thermal actuators for micro-assembly. In RF. Wolffenbuttel, & e.a. (Eds.), Proceedings MME 2005 (pp. 284-287). Inform Trycket AB.